JPS5640846Y2 - - Google Patents
Info
- Publication number
- JPS5640846Y2 JPS5640846Y2 JP1976094109U JP9410976U JPS5640846Y2 JP S5640846 Y2 JPS5640846 Y2 JP S5640846Y2 JP 1976094109 U JP1976094109 U JP 1976094109U JP 9410976 U JP9410976 U JP 9410976U JP S5640846 Y2 JPS5640846 Y2 JP S5640846Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976094109U JPS5640846Y2 (en]) | 1976-07-15 | 1976-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976094109U JPS5640846Y2 (en]) | 1976-07-15 | 1976-07-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5312847U JPS5312847U (en]) | 1978-02-02 |
| JPS5640846Y2 true JPS5640846Y2 (en]) | 1981-09-24 |
Family
ID=28704669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976094109U Expired JPS5640846Y2 (en]) | 1976-07-15 | 1976-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5640846Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002180238A (ja) * | 2000-12-18 | 2002-06-26 | Nikon Corp | 成膜装置，成膜方法，光学部材，照明光学系，露光装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5067732A (en]) * | 1973-10-22 | 1975-06-06 | ||
| JPS5230156B2 (en]) * | 1973-10-23 | 1977-08-05 |
-
1976
- 1976-07-15 JP JP1976094109U patent/JPS5640846Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5312847U (en]) | 1978-02-02 |